Heidelberg Instruments is a German high-tech company located in Heidelberg, Germany. Since 1990, the company has been market leader for laser lithography systems capable for direct writing as well as mask making. Throughout the years the system has been continously improved and adapted to customers' and industries' needs for various applications, such as high density interconnects, MEMS, integrated optics, flat panel displays, etc.

The field-proven technology of the DWL systems guarantees a reliable production of precision photomask with minimum features down to 0.4microns at 25nm writing grid. All systems are available with different laser sources and active write areas up to 70 inches.

DWL 800 Imager

DWL 200 Imager

DWL 66 Imager

LAM 66 Ablation