High Speed Photomask Imager CHROME FILM EMULSION LAMs

Increase Yields by up to 15% thru Improved Registration and Image Quality!

Produce high quality, economical, film or glass photomasks at film speeds. Use glass or glass-quality film for your packaging, fineline flex, buildup technology and other products.
Follow your technology roadmap photomask requirements as feature sizes and pitches are reduced. Migrate from film to glass phototools without additional investment in imagers.

The IGI LAZERWRITE 2100 is designed for people whose imaging requirements exceed current industry standards for speed and quality. The flatbed design addresses problems inherent with drum-type photoplotters. It incorporates a high integrity mechanical structure, precision coordinate measurement system, high speed positioning control system, and beam position control.

With the IGI LAZERWRITE 2100 the optics remain fixed and the media is moved. Since the optic path length remains constant any need to refocus is handled automatically. This simple design makes the system fast, reliable and creates images with consistent high quality. This technology ensures positional and orthogonal accuracy, for the highest image quality.




Specifications

Material/Plate Size Active Area Photocomposition Precision Repeatability Resolution Positional Accuracy

700mm x 800mm (27.5" x 32"), up to 10mm (0.4") Thickness 680mm x 800mm (27.5" x 32") +/- 0.5um 1.0um 0.5um +/- 0.40um per linear inch of active area (max 3um)

Model 2100C - 413nm

Image Media Minimum Geometry/Space CD Tolerance CD Uniformity Write Time (18" x 22")

Resist Coated Chrome 10um +/- 2.0um 1.5um 52 minutes

Emulsion 15um +/- 2.5um 2.0um 52 minutes

Fast Emulsion 15um +/- 3.0um 3.0um 30 minutes

Model 2100F - 532nm

Image Media Minimum Geometry/Space CD Tolerance CD Uniformity Write Time (18" x 22")

Emulsion 10um +/- 2.5um 2.0um 52 minutes

Fast Emulsion 12um +/- 3.0um 3.0um 30 minutes

Requirements

Temp. RG Power Cooling Water Supply LazerWrite Footprint Weight

20°C +/- .5 °C 40% to 50% Non-Condensing 230V ± 5%, 50/60 Hz, 16 amps, single phase. 110V 50/60 Hz, 15 amps Model 2100 C – 208 3 Phase 50 amps 10 L/min, 10°C to 20°C, +/- 2°C 2190mmX2140mm, 2100mm high(87" X 85", 83" high) Weight 3900kg (8800 lbs)